It's a mistake to assume wafer clamp rings have to polyimide. Several other work about as well. Silicon wafers aren't the only things that lose material in the various etching steps of IC ...
The PE-100 Convertible plasma system incorporates reactive ion etching and isotropic etching/cleaning technologies into a stand-alone benchtop system. The all aluminum chamber has over 240 in. 2 of ...
NEWPORT, Wales — Plasma etch machine vendor Surface Technology Systems plc (STS) has unveiled a family of plasma etch and plasma-enhanced deposition tools intended for volume production of ...
A parametric study reveals more sustainable etch dynamics, chromium mask selectivity, and pathways toward zero-global-warming ...
Plasma etching and atomic layer etching (ALE) constitute essential techniques in the fabrication of next‐generation nanoscale devices. Plasma etching utilises ionised gases to selectively remove ...
Mass spectrometry, by contrast, is a powerful technique for the analysis of any process gas. Careful consideration of differences in pressure, reaction time scales and process flow is essential for ...
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